Consider the following statements:
X-rays are used for lithography in IC technology because
1. high resolution is achievable
2. scattering effects are small
3. they can be focused easily
4. they can be deflected easily
Which of the statements given above are correct?
A. 1 and 2
B. 1 and 3
C. 1 and 4
D. 2 and 3
Answer: Option A
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